Custom High Purity Flanged Quartz Tube Project Case | Fused Silica Tube With Integrated Flange for Semiconductor CVD Tube Furnace Vacuum Reactor-sara
Veröffentlicht am: June 22, 2026
Project Case: Custom High-Purity Flanged Quartz Glass Tube
Case Overview
This case covers customized flanged quartz tube batch production for an overseas semiconductor equipment manufacturer. The client needed high-sealing, high-temperature resistant fused silica tubes with integrated quartz flanges for their CVD reaction chamber and high-temperature annealing furnace. We provided full one-stop customization including tube size, flange bolt hole layout, wall thickness and high-temperature stress relief annealing, solving their long-standing problems of pipeline leakage, high impurity pollution and frequent tube cracking during thermal cycling.
Client Pain Points Before Cooperation
- Original borosilicate glass pipes deformed at working temperature above 900℃, causing flange joint leakage and unstable vacuum environment.
- Ordinary welded quartz tubes without annealing cracked easily after repeated cold & hot cycles, high replacement cost and production downtime loss.
- Uncontrolled dimensional tolerance of flanges, poor matching with client’s metal sealing fixtures, low processing yield.
- Low-purity quartz raw material brought metal ion contamination, affecting wafer processing precision.
Our Customized Quartz Flange Tube Solution
- Material Selection: Adopt 99.99% synthetic high-purity fused silica with low hydroxyl content, no metal impurities, compatible with semiconductor ultra-clean process.
- Integrated Hot Welding Flange: Integrally fuse quartz flange on single/both ends of tube body, high-strength welding seam, fully annealed to eliminate internal stress, resist thermal shock.
- Precision CNC Machining: Custom outer diameter, wall thickness, tube length, flange outer diameter, bolt hole position & aperture with strict tolerance ±0.02mm.
- Surface Treatment: Flame polished inner & outer tube wall, smooth without bubbles, scratches or micro-cracks, excellent UV & visible light transmittance.
- Structural Customization: Support single flange, double flanges, closed dome bottom, thick-wall high-pressure resistant structure as per customer drawing requirements.
Delivery & Actual Operation Effect
We finished sample confirmation, trial order and mass production within 12 working days, completed full dimensional inspection, high-temperature aging test and vacuum tightness test before shipment.
After customer installation and long-term continuous operation:
- Zero leakage under high vacuum & 1150℃ continuous working temperature;
- No cracking after 100+ thermal cycling tests, service life increased by over 3 times;
- Zero impurity precipitation, wafer product yield improved by 16%;
- Standard flange size perfectly matched client’s existing clamping & sealing parts, greatly reducing equipment assembly time.
